From HFML-FELIX Wiki
Excimer Lasers
- Argon Fluoride 193 nm
- Fluorine (F2) 157 nm
| Excimer lasers | Type | Serial number | wavelength | rep rate | Power specs | Actual | year | location | function | comments |
|---|---|---|---|---|---|---|---|---|---|---|
| Neweks PSX 501 "Joost" | 193 nm | variable | 1.5 mJ | - | US5.2 | so-so | ||||
| Neweks PSX 501 "Anouk" | 193 nm | variable | 6 mJ | - | US5.2 | refrubished August 2022, Aivo Jenk | ||||
| 193 nm | Huygens (Jolijn) | |||||||||
| Neweks PSX-100 | 157 nm | ?? | kast Felice hal |
Gas mixtures:
- F2: Miyajima-san: For the PSX-100 we use a F2 0.08% / He (buffer gas) mixture (Linde).
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